IMS- Micro/Nano Fabrication Facility
Dektak 150 Contact Profiler
Information
Schedule
Training
Equipment Description

The Georgia Tech Veeco Dektak 150 is a surface profilometer (by stylus contact) capable of down to 4 angstrom step height measurement. This profilometer is comparable to the Tencor P15 Profilometers in performance and operation.

Specifications:
-1mm max step height
-automated X and Y stage
-up to 6" (150mm) wafer
-stylus force down to 0.5 mg

Institute Georgia Tech
Department IMS- Micro/Nano Fabrication Facility
Sub Tool Of
 Marcus Inorganic Cleanroom
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Contact Information
Georgia Institute of Technology
Shared User Management System
791 Atlantic Drive
Atlanta GA 30332-0269 
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