7.4 Thin Film Characterization Equipment
Woollam M2000 Ellipsometer
Film thickness/RI measurement
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Dektak 150 Contact Profilometer
Profile measurement
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![](https://sums.gatech.edu/CKEditor/Download.aspx?GUID=2020428EXBCIGItmzvSuMaVD5nw2a1Fg0L5wxHW1aiJtk7OAB) |
![](https://sums.gatech.edu/CKEditor/Download.aspx?GUID=2020428AooJV6uVSCpwRUdpixaGB3VQyYZCIPmz8F371fmt61) |
Nanospec Reflectometer
Film thickness measurement
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Bowoptic Stress Measurement Tool
Film stress measurement
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![](https://sums.gatech.edu/CKEditor/Download.aspx?GUID=2020428euWHtjA1x6Wj6nQqSpY50RvIZi63M6rH46JbEByC0v) |
![](https://sums.gatech.edu/CKEditor/Download.aspx?GUID=2020428197UxOAmT27x0W1eLneQedUY9t4e2w6V5Re07diC4T) |