IMS- Micro/Nano Fabrication Facility
Bowoptic Stress Measurement
Information
Schedule
Training
Equipment Description

The Georgia Tech BowOptic 208 is an automatic wafer stress measurement machine that uses a proven accurate method to measure wafer stress. Wafers sizes up to 8” can be loaded onto the chuck. The wafer moves automatically into the tool for precision measurement.

Institute Georgia Tech
Department IMS- Micro/Nano Fabrication Facility
Sub Tool Of
Marcus Inorganic Cleanroom
Contact Information