IMS- Micro/Nano Fabrication Facility
Nanospec Reflectometer - Pettit
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Equipment Description

The Georgia Tech NanoSpec 3000 is a film thickness measurement system that utilizes a modern small spot spectroscopic reflectometer that is built on a simple-to-use tabletop platform.

Institute Georgia Tech
Department IMS- Micro/Nano Fabrication Facility
Sub Tool Of
Pettit Cleanroom
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