IMS- Micro/Nano Fabrication Facility
Tencor P15 Profilometer
Information
Schedule
Training
Equipment Description

The Georgia Tech KLA Tencor P15 is a robust, programmable stylus profiler system that provides 2D and 3D topographic measurements. Specifications: -364um max step height -6" sample or smaller -2um radius, 60 degree tip

Institute Georgia Tech
Department IMS- Micro/Nano Fabrication Facility
Sub Tool Of
 Pettit Cleanroom
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Contact Information
Georgia Institute of Technology
Shared User Management System
791 Atlantic Drive
Atlanta GA 30332-0269 
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