IEN - Micro/Nano Fabrication Facility
Tencor P15 Profilometer (Right)
Information
Schedule
Training
Equipment Description

The Georgia Tech KLA-Tencor P-15 profiler is a highly sensitive surface profiler that measures step height and stress on a wafer surface. Specifications: -131um max step height -6" sample or smaller -film stress measurement

Institute Georgia Tech
Department IEN - Micro/Nano Fabrication Facility
Sub Tool Of
 Marcus Inorganic Cleanroom
Related Links
Contact Information
Georgia Institute of Technology
Shared User Management System
791 Atlantic Drive
Atlanta GA 30332-0269 
© Georgia Institute of Technology