IMS- Micro/Nano Fabrication Facility
Woollam Ellipsometer
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Training
Equipment Description

The Georgia Tech Woollam Ellipsometer determines the film thickness and optical properties of a sample. The data is obtained by measuring the change in polarization state of light that occurs when light is reflected off the surface of (or transmitted through) a sample.

Institute Georgia Tech
Department IMS- Micro/Nano Fabrication Facility
Sub Tool Of
Marcus Inorganic Cleanroom
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