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Research Capabilities
E-beam Lithography
Etching
Etching Landing Page
Georgia Tech HF Vapor Etching Landing Page
Hydrofluoric Vapor Etcher
Xactix Xenon Difluoride Etcher
Georgia Tech ICP Landing Page
Georgia Tech Plasma Clean Landing Page
Georgia Tech RIE Landing Page
High Temperature Solutions
IEN - Biocleanroom
Materials Growth
Metrology
Micro-machining Laser Lab
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Photolithography
Research Equipment
Thin Films
Hydrofluoric Vapor Etcher
Related Links
Link to equipment page
Related Media
HF Etcher Manual
Manufacturer Info
Contact Information
Institute for Electronics and Nanotechnology (IEN)
Georgia Institute of Technology
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