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IMS- Micro/Nano Fabrication Facility
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Research Capabilities
1. Photolithography
2. Etching
2.1 HF Vapor Etching
2.1.1 Hydrofluoric Vapor Etcher
2.1.2 Xactix Xenon Difluoride Etcher
2.2 ICP Equipment
2.3 Plasma Cleaning
2.4 RIE Equipment
2.5 DRIE/ICP Etching Capabilities
3. Thin Films
4. Micro-machining Laser Lab
5. High Temperature Solutions
6. Materials Growth
7. Metrology
8. IEN - Biocleanroom
9. Packaging
E-beam Lithography
Research Equipment
2.1.1 Hydrofluoric Vapor Etcher
Related Links
Link to equipment page
Related Media
HF Etcher Manual
Manufacturer Info
Contact Information
Institute for Electronics and Nanotechnology (IEN)
Georgia Institute of Technology
For process support please click below
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