The Georgia Tech Denton Infinity is a six pocket e-beam evaporator system used to coat samples with various metals. A high-intensity beam of electrons is focused on the center of a crucible containing the material to be evaporated. It also has a single power node for filament evaporation.

Function

• Dual System E-beam and Fialment Evaporator

Materials Deposited

• Ti, Cu, Al, Ni, NiFe, Au

Component Specifications

• 6 pocket 25cc crucibles
• Single Filament Evaporation Node.

Substrate Size

• Supports up 6” wafers

Process Pressure

• 5x10-6Torr to 5x10-7

Temperature

• Heater can reach up to 200C

Vendor Specified Capabilities

• Dual capabiltiy of E-beam and Filament Evaporation