IMS- Micro/Nano Fabrication Facility
Olympus MX61 Microscope - Pettit
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Equipment Description

The Georgia Tech Olympus MX61 200mm semiconductor inspection microscope has been developed specifically to meet the demands of today’s wafer inspections. The emphasis is on ergonomics and performance to provide the highest productivity and comfort for the operator.

Institute Georgia Tech
Department IMS- Micro/Nano Fabrication Facility
Sub Tool Of
Pettit Cleanroom
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