IMS- Micro/Nano Fabrication Facility
Microscope M3 - Soft Lithography
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Equipment Description

The Georgia Tech Microscope M3 (Olympus MX40) is a high-resolution, reflected-light, optical microscope for 6-inch wafer inspection. In addition to brightfield and darkfield, the microscope offers linearly polarized light and Nomarski DIC (differential interference contrast) sample inspections.

Institute Georgia Tech
Department IMS- Micro/Nano Fabrication Facility
Sub Tool Of
Georgia Tech Biocleanroom
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