IMS- Micro/Nano Fabrication Facility
Microscope 4 - IR (Infrared)
Information
Schedule
Training
Equipment Description

The Georgia Tech Olympus IR microscope is uses IR imaging for alignment, identification of substrate contamination and critical dimension inspections. Objective lenses for this microscope consist of 10x, 20x, 50x, and 100x. The time limit on this machine is one hour.

Institute Georgia Tech
Department IMS- Micro/Nano Fabrication Facility
Sub Tool Of
 Marcus Inorganic Cleanroom
Related Links
Contact Information
Georgia Institute of Technology
Shared User Management System
791 Atlantic Drive
Atlanta GA 30332-0269 
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