IMS- Micro/Nano Fabrication Facility
Microscope M4
Information
Schedule
Training
Equipment Description

The Georgia Tech IC inspection microscope configured for brightfield, darkfield, and DIC observation of 200mm wafers, motorized 6-place nosepiece with CFI LU Plan BD 5x/10x/20x/50x/100x objectives.

Institute Georgia Tech
Department IMS- Micro/Nano Fabrication Facility
Sub Tool Of
 Marcus Inorganic Cleanroom
Related Links
Contact Information
Georgia Institute of Technology
Shared User Management System
791 Atlantic Drive
Atlanta GA 30332-0269 
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