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Research Capabilities
1. Photolithography
2. Etching
3. Thin Films
4. Micro-machining Laser Lab
5. High Temperature Solutions
6. Materials Growth
7. Metrology
7.1 Imaging Equipment
7.2 Material Characterization Equipment
AMSCOPE Inverted Microscope
FTIR Spectrometer
Malvern Zetasizer
Microscope 1 - IC
Microscope 2 - IC
Microscope 4 - IR (Infrared)
Microscope M1
Microscope M2
Microscope M3 - Soft Lithography
Microscope M4
Microscope M5
Microscope P1
Microscope P2
Microscope P3
Microscope P4
Microscope P5
Olympus MX50 Microscope
Olympus MX61 Microscope - Pettit
Q600 TGA/DSC
Q-sense QCM-D
UV-VIS Spectrometer
7.3 Surface Characterization Equipment Landing Page
7.4 Thin Film Characterization Equipment
8. IEN - Biocleanroom
9. Packaging
E-beam Lithography
Research Equipment
Microscope P3
Information
Schedule
Training
Equipment Description
Stereoscope in Marcus
Institute
Georgia Tech
Department
IEN - Micro/Nano Fabrication Facility
Sub Tool Of
Pettit Cleanroom
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