IMS- Micro/Nano Fabrication Facility
LEO FE-SEM
Information
Schedule
Training
Equipment Description

The Georgia Tech LEO 1530 FE-SEM is a hi-resolution SEM capable of sub-nanometer resolution. Detectors: In-Lens, SE, and BSE -capable of up to 6" wafer -operational voltage 0.2-30kV -low voltage for viewing non-conductive samples -x/y/z axes motorized stage

Institute Georgia Tech
Department IMS- Micro/Nano Fabrication Facility
Sub Tool Of
 Pettit Cleanroom
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Contact Information
Georgia Institute of Technology
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791 Atlantic Drive
Atlanta GA 30332-0269 
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