IMS- Micro/Nano Fabrication Facility
Dage X-Ray
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Equipment Description

The Georgia Tech Dage X-Ray XD7600NT provides the highest resolution and largest X-ray images for failure analysis with oblique angle views up to 70 degrees, displayed at full 2 Mpixel resolution on screen. -750nm (0.75 micron) feature recognition -Revolutionary ‘filament-free’ Dage NT X-ray tube -AXIS – Active Image Stabilisation -XiDAT 2.0 imaging chain -Up to 70 degree oblique angle views over the entire inspection area -Enhanced automated inspection routines -Automatic BGA and die-void measurements -Comprehensive data logging and reporting facilities -Uninterrupted rotating live oblique views 360 degrees around any point in the sample

Institute Georgia Tech
Department IMS- Micro/Nano Fabrication Facility
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