IMS- Micro/Nano Fabrication Facility
Hitachi S-4700 FE-SEM
Information
Schedule
Training
Equipment Description

The Georgia Tech Hitachi S-4700 FE-SEM is a cold field emission high resolution scanning electron microscope. This SEM permits ultra high resolution imaging of thin films and semi-conductor materials on exceptionally clean specimens.

Institute Georgia Tech
Department IMS- Micro/Nano Fabrication Facility
Sub Tool Of
 Marcus Inorganic Cleanroom
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Contact Information
Georgia Institute of Technology
Shared User Management System
791 Atlantic Drive
Atlanta GA 30332-0269 
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