Hitachi S-3700N VP-SEM

Keywords: Georgia Tech, gatech, SEM, Variable Pressure, VP-SEM, E-SEM, VPSEM, ESEM, non-conductive, non conductive, organic, cleanroom, EDX, EDS, analysis, materials, characterization, material

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Training

Equipment Description

The Georgia Tech Hitachi S-3700N Variable Pressure SEM, located in the Georgia Tech Biocleanroom, features a low vacuum observation of 6–270 Pa (7mT-2Torr) which enables imaging of non-conductive samples (dielectrics) and wet/moist samples such as cultured cells, without traditional sample preparation (gold coating/drying). A Deben Coolstage controls sample temperature between -10F and 120F to control sample vapor pressure.

-Magnification range: x5 – x300,000
-Resolution @ 30kV (SE in High Vacuum Mode): 3nm
-Resolution @ 30kV (BSE in 6Pa Low Vacuum Mode): 4nm

Institute	Georgia Tech
Department	IMS- Micro/Nano Fabrication Facility
Sub Tool Of	Georgia Tech Biocleanroom
System Specifications	-Resolution in SE imaging (High vacuum mode) 3.0nm @ 30kV 10nm @ 3kV -Resolution in BSE Imaging (Low vacuum mode) 4.0nm @ 30kV -Accelerating voltage 0.3-30kV -Magnification 5x - 300,000x -Specimen stage (X,Y Axis) 150mm x 110mm -Maximum specimen size 300mm diameter -Maximum observation area 203mm dia (with R) -Maximum specimen height 110mm (WD=10mm) -Stage control Computer eucentric stage with 5-axes motorization -Specimen tilt -20/+90 degrees
Applications	-Biological (food, plant, emulsions) and other non-conductive sample imaging -Surface topography analysis -Polymer nanoparticles imaging -Photoresist pattern integrity analysis -Elemental analysis with EDS