Olympus LEXT 3D Confocal Microscope
Information
Schedule
Training
The Georgia Tech Olympus LEXT, located in the Georgia Tech Biocleanroom, is a material laser confocal microscope with fixed laser wavelength of 405nm with magnification ranges: 108x – 17,280x. X-Y plane resolution:~120nm, height resolution:~20-30nm. Measurement modes: profile, area/volume, surface roughness, geometric, film thickness
| Institute |
Georgia Tech |
| Department |
IEN - Micro/Nano Fabrication Facility |
Sub Tool Of  |
Georgia Tech Biocleanroom |
| System Specifications |
Laser Wavelength: 405nm
X-Y plane resolution: 20nm
Z-axis resolution: 10nm
|
| Applications |
Non-contact measurement tool capable of step height, area/volume, surface roughness, particle, and film thickness measurements of 3D samples. |
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