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Research Capabilities
E-beam Lithography
Etching
High Temperature Solutions
IEN - Biocleanroom
Materials Growth
Metrology
Micro-machining Laser Lab
Packaging
Photolithography
Research Equipment
Thin Films
Georgia Tech ALD Landing Page
Georgia Tech E-Beam Landing Page
Georgia Tech Filament Evaporator Landing Page
Georgia Tech PECVD Landing Page
Black Magic PECVD
Oxford ICP-PECVD
STS PECVD 2
STS PECVD 3
Unaxis PECVD
Georgia Tech Sputterer Landing Page
SCS Parylene Coater
Georgia Tech PECVD Landing Page
Unaxis PECVD
SiO2/SiN PECVD
Black Magic PECVD
CNT plasma growth
STS PECVD
SiO2/SiN PECVD
Oxford ICP-PECVD
SiO2/SiN PECVD
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