The Georgia Tech Plasma Cleaner uses an active ionized gas (plasma) in a low pressure environment to descum and remove residual organics and thin oxides from samples. -typical chamber temperature 25C-80C (heat from plasma) -little to no turbulence -Ar or O2 gas -sample size can vary from small pieces to 12inx12inx4in.
Functions
- Descum and remove residual organics and thin oxides
- Controlled through MicroLogix PLC upgrade
Gases
Process Pressure
Substrate
- size varies upon user request
Temperatures