The Georgia Tech sulfurization furnace is used to deposit sulfur at high temperatures. The tool is setup to inject sulfur into the chamber then allow the sulfur to soak, covering all substrates. There is a turbo pump installed on the system to allow for low base and process pressure and good process control. The maximum temperature is 1050 C with a max ramp rate of 120 C/min. Gases available are argon, hydrogen, and methane.