The Georgia Tech SiGe Nanowire furnace is configured for depositing Si nanowires from metal nanoparticles such as Au. Substrate material is typically Si. Samples are heated via infrared lamps from top and bottom.

Specifications:
350C - 900C
SiH4, H2, Ar, Ge, 0.1% PH3
base pressure 1e-3 Torr

(keywords: silicon germanium growth materials IR)