IEN - Micro/Nano Fabrication Facility
6.4.b CVD FirstNano Graphene Furnace 2

 

 

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Equipment Description

The Georgia Tech CVD FirstNano Graphene 2 is currently configured to grow graphene on Cu foil samples. Samples are heated via infrared lamps from top and bottom. A turbo pump and load-lock allows for low base pressure and thus low back-ground O2 contamination.

Specifications:
1150C max
4" wafer and small pieces
SiH4, H2, Ar, NH3
Base pressure 1e-7 Torr

(keywords: growth materials copper)

Institute Georgia Tech
Department IEN - Micro/Nano Fabrication Facility
Sub Tool Of
Marcus Inorganic Cleanroom
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