The Georgia Tech Black Magic PECVD is Plasma-Enhanced Chemical Vapor Deposition (PECVD) equipment for deposition of high quality carbon nanotube (CNT), carbon nanoribbon (CNR) and graphene thin films.

Specification:

1. Single-Wall, multi-wall CNT, CNR
2. Substrate size up to 4" wafer
3. Low temperature growth
4. Super growth of CNT