Hermes LS500XL CO2 Laser -

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IMS- Micro/Nano Fabrication Facility

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Research Capabilities

1. Photolithography

4. Micro-machining Laser Lab

Alabama UV Laser

Hermes LS500XL CO2 Laser

OPTEC Femtosecond Laser

Resonetics IR Laser

5. High Temperature Solutions

6. Materials Growth

8. IEN - Biocleanroom

E-beam Lithography

Research Equipment

Hermes LS500XL CO2 Laser

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Georgia Institute of Technology
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Atlanta GA 30332-0269

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