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Research Capabilities
1. Photolithography
2. Etching
3. Thin Films
4. Micro-machining Laser Lab
5. High Temperature Solutions
5.1 High Temperature Vacuum Oven and RTA
AET RTP
Heraeus Vacuum Oven 1 (Top)
Heraeus Vacuum Oven 2 (Bottom)
JetFirst RTP
SSI RTP
5.2 Thermal Processing
6. Materials Growth
7. Metrology
8. IEN - Biocleanroom
9. Packaging
E-beam Lithography
Research Equipment
AET RTP
Information
Schedule
Training
Equipment Description
The Georgia Tech AET RTP
Institute
Georgia Tech
Department
IEN - Micro/Nano Fabrication Facility
Sub Tool Of
Marcus Inorganic Cleanroom
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Related Links
Link to equipment page
Contact Information
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