IEN - Micro/Nano Fabrication Facility

Georgia Tech Micro-machining Laser Laboratory

Resonetics IR Laser Capabilities

  • Thin metal film machining
  • Laser wavelengths: 1064nm/524nm
  • Beam size: 50 µm 
  • Materials: metals, PZT ceramics, permanent magnets, alumina, and silicon
  • Applications:  microneedles, interdigitated and planar metal designs, sintered multi-layer alumina devices, metal welding, silicon device trimming, and so on


OPTEC Femtosecond Laser Capabilities

  • 1030nm Wavelength (nm)
  • Machining head: Galvo scanner, fixed lens, cutting head, and Infinite Field of View (IFOV)
  • Laser type (pulse duration): picosecond, femtosecond
  • Max. Scanner field: 20x20 mm
  • Minimum Spot size: 6 µm for fixed head, 14µm for galvo head
  • XY stages travel: 300x300 mm
  • Submicron stages resolution
  • Materials: metals, polymers, composites, glass...
  • Class 1 laser system (fully interlocked)
  • Can be used for:
    • Cutting
    • Milling
    • Drilling
    • Tube processing
    • Composite material cutting
    • Scribing
    • Surface structuring



Keywords: laser, femtosecond, picosecond, uv, ir, galvo, fixed lens, cutting head, rotational cutting, beam size, cutting, drilling, milling, tube processing, thin metal film machining, metal cutting, pzt cutting, ceramic cutting, polymer cutting, composites cutting, class 1 laser, 1030nm, 1064nm, 524nm, georgia tech, gatech, ien, institute of electronics and nanotechnology, nanotechnology, electronics, resonetics, optec

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Contact Information
Richard Shafer
Georgia Institute of Technology
Office 107C: Lab 160
404 894 9434 office
404 538 6145 cell/text