IEN - Micro/Nano Fabrication Facility
Heraeus Vacuum Oven 2 (Bottom)
Information
Schedule
Training
Equipment Description

The Georgia Tech Heraeus Vacuum Oven used for heating of substrates under 5-10 milliTorr Vacuum - up to 350C under vacuum. The oven can be programmed to ramp, dwell, and cool down due to the user's specifications.

Institute Georgia Tech
Department IEN - Micro/Nano Fabrication Facility
Sub Tool Of
 Marcus Inorganic Cleanroom
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Contact Information
Georgia Institute of Technology
Shared User Management System
791 Atlantic Drive
Atlanta GA 30332-0269 
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