Login
Select Login Portal
IMS- Micro/Nano Fabrication Facility
Become a User
Services
Capabilities
Safety
Processing
Rates
Contact
SUMS Home
Search
Login
Select Login Portal
Processing
1. New User Preparation
2. Processing Basics
2.1 Photolithography
2.2 Thin Film Deposition
2.3 Plasma Etching
2.4 Thermal Processing
2.5 Metrology
2.6 Packaging
2.7 Technical Seminars
3. Recipe Library
4. Processing Procedure
5. Process/Equipment Selection
6. Processing Materials
7. Equipment Baseline
8. Processing Safety
9. Request Help
A. System Contamination Control Policy
2.4 Thermal Processing
Thermal Processing Equipment Overview
Thermal Processing Fundamentals
Related Links
Tystar Nitride Furnace 1
Tystar Nitride Furnace 2
Tystar Nitride Furnace 3
Tystar Nitride Furnace 4
Tystar Poly Furnace 1
Tystar Poly Furnace 2
Tystar Poly Furnace 3
Tystar Poly Furnace 4
Contact Information
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332
For process support please click below
Loading