IEN - Micro/Nano Fabrication Facility
Karl Suss RC8 Spinner
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Equipment Description

The Georgia Tech RC8 programmable process spinner is reserved for photoresist use. Spin coatings of other materials must be done with other spinners. Photoresist coatings are usually performed with the CEE 100CB spin coaters. This spinner is capable of processing up to 6" wafers, has motorized and programmable position dispense arm, maximum speed of 5,000 rpm and an acceleration of 100 to 5000 rpm/s.

Institute Georgia Tech
Department IEN - Micro/Nano Fabrication Facility
Sub Tool Of
Pettit Cleanroom
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