1.3 Direct Writing -

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IMS- Micro/Nano Fabrication Facility

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Research Capabilities

1. Photolithography

1.1 Photo Resist Coaters

1.2 Optical Lithography

1.3 Direct Writing

1.3.1 Heidelberg MLA150 no.1

1.3.2 Heidelberg MLA150 no.2

4. Micro-machining Laser Lab

5. High Temperature Solutions

6. Materials Growth

8. IEN - Biocleanroom

E-beam Lithography

Research Equipment

1.3 Direct Writing

Heidelberg MLA150 (375) Direct pattern writer	Heidelberg MLA150 (375/405) Direct pattern writer

Heidelberg MLA300 Direct pattern writer

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