IMS- Micro/Nano Fabrication Facility
1.2 Optical Lithography

 

Karl Suss TSA MA-6 Mask Aligner

Contact Mask Aligner i-line, h-line

EVG 620 Mask Aligner

Contact Mask Aligner i-line

Karl Suss MA-6 Mask Aligner - Pettit

Contact Mask Aligner i-line, h-line

Suss Microtec MJB4

Contact Mask Aligner i-line