IEN - Micro/Nano Fabrication Facility
Georgia Tech Optical Lithography Landing Page

 

Karl Suss TSA MA-6 Mask Aligner

Contact Mask Aligner i-line, h-line

EVG 620 Mask Aligner

Contact Mask Aligner i-line

Karl Suss MA-6 Mask Aligner - Pettit

Contact Mask Aligner i-line, h-line

Suss Microtec MJB4

Contact Mask Aligner i-line