IMS- Micro/Nano Fabrication Facility
Karl Suss RC8 Spinner - Inorganic
Information
Schedule
Training
Equipment Description

The Georgia Tech RC8 programmable process spinner is reserved for photoresist use. Spin coatings of other materials must be done with the other spinners. This spinner has a maximum speed of 5,000 rpm and an acceleration of 100 to 1000 rpm/s.

Training on general spinner is a prerequisite as you must pass the General Spinner Exam to gain access to this tool.

Institute Georgia Tech
Department IMS- Micro/Nano Fabrication Facility
Sub Tool Of
Marcus Inorganic Cleanroom
Contact Information