IMS- Micro/Nano Fabrication Facility
Karl Suss MA6 Mask Aligner - Pettit
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Schedule
Training
Equipment Description

The Georgia Tech mask aligners are used in photolithographic processes to transfer a pattern from a mask to a photoresist coating on the substrate. The MA-6 can handle wafers up to 6" in size, and is optimized for 435 nm wavelength.

Institute Georgia Tech
Department IMS- Micro/Nano Fabrication Facility
Sub Tool Of
Pettit Cleanroom
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