Purpose: To strip organic materials from samples using UV-light, ozone, and heat

Location: Marcus Cleanroom

Tools: Samco UV Ozone dry stripper

Setup Procedures:

1. After turning on the machine, purge the chamber for 3 minutes.
2. Program your recipe.
   • Turn on the heater (if needed) and set the temperature to the desired level.
   • Input the process time.
3. Calibrate the oxygen flow.
   • Close and latch the chamber lid.
   • Start the recipe.
4. Once calibrated, stop the recipe and purge the chamber again for 3 minutes.
5. If using the UV lamp and ozone generator, turn them on.
   • If only using oxygen flow, do not turn on the ozone generator.

Number of substrates: 1

Process Procedures:

1. Open the lid and carefully place your sample inside using metal tweezers.
   • Your sample may slide around initially, but make sure it is back in the center of the chamber before the process.
2. Close the chamber lid, making sure that both latches are securely fastened.
3. Run the recipe (10 minutes or less).
4. Remove your sample from the chamber.
5. Close and latch the chamber lid before logging off the tool.

Time: approximately 20 minutes

Verification:

• Particle level: can be observed under microscope with dark field, or measured accurately with Surfscan
• Hydrophobicity: can be measured with contact angle measurement tool