Introduction:

^*AMI: Acetone, methanol and isopropanol

Purpose: To remove photoresists, debris and residues from substrates

Location: General purpose fumehood

Chemicals: acetone, methanol, isopropanol and DI water (optional)

Supplies Needed: glass or Pyrex dish, tweezers, Texwipe, nitrogen gun, chemical warning form and PPE

Setup Procedures:

1. Find an available fumehood that is not currently being used for any process. Make sure the area is free of heat sources and other chemicals, and the solvent waste container is NOT filled to the top.
2. Fill out the chemical warning form (located at fumehood) with proper information (chemicals, contact information, process time and hazards).
3. Please notify research users in the area that you are going to use solvents.
4. Setup the waste collection dish, texwipe and PPE gear.

Number of Substrates: 1

Process Procedures:

1. Securely hold the substrate with tweezers over the waste collection dish.
2. Squirt acetone evenly across the substrate for approximately 30 seconds (1min). Lay down substrate on texwipe, quickly rinse tweezers with acetone and then grab substrate at another spot, rinse it gain.
3. Squirt methanol evenly across the substrate for approximately 30 seconds (1 min).
4. Squirt isopropanol evenly across the substrate for approximately 30 seconds (1 min).
5. (Optional) Rinse substrate with DI water for approximately 30 seconds (1 min).
6. Place your sample on a texwipe and blow dry with the nitrogen gun. Use a sweeping motion while working from one side of the sample to the opposite side (1 min).

Time: approximately 5 minutes

Comments:

1. Do not spray your sample over the top of the solvent waste container. If you drop your sample in a dish, it is easily retrieved. However, if you drop it in the solvent waste container, there is no way to get it out. Use the glass or Teflon dishes in the cleanroom for cleaning purposes.
2. Spray methanol immediately after spraying acetone on your sample. If you let the acetone dry, it will leave a white residue.
3. If you need to leave your sample soaking in acetone for an extended amount of time, be sure to add enough acetone to the container and cover the container with aluminum foil so that all the acetone does not evaporate.

Verification:

1. Particle level: can be observed under microscope with dark field, or measured accurately with Surfscan
2. Hydrophobicity: can be measured with contact angle measurement tool