Purpose: To remove organic residuals from substrate surface

Location: Marcus Inorganic Cleanroom

    Tools: Yes R-1 Plasma Cleaner

Setup Procedures:

1. Make sure the electrode shelves are in place and secure.
2. Select the desired plasma recipe.

Number of substrates: multiple as long as they can fit on the substrate shelf

Process Procedures:

1. Place your sample in the process chamber.
2. Start the recipe.
3. Take note of the process parameters during the process step and record (6 min).
4. Select and run the vent process (1-2 min).
5. Remove your sample from the chamber.
6. Make sure the door is closed.

Time: approximately 15 minutes

Verification:

• Particle level: can be observed under microscope with dark field, or measured accurately with Surfscan
• Hydrophobicity: can be measured with contact angle measurement tool