IEN - Micro/Nano Fabrication Facility
4.3 Thin Film Deposition/Growth

This section details the proper procedures to follow while using various thin film deposition/growth techniques in the GT IEN cleanrooms. Please select from the links below to see information about a specific topic.


Contact Information
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332

For process support please click below