IEN - Micro/Nano Fabrication Facility
Olympus LEXT 3D Material Confocal Microscope

Keywords: Georgia Tech, gatech, organic, cleanroom, analysis, materials, characterization, LEXT, confocal, microscope, laser scanning, 3D

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Equipment Description

The Georgia Tech Olympus LEXT, located in the Georgia Tech Biocleanroom, is a material laser confocal microscope with fixed laser wavelength of 405nm with magnification ranges: 108x – 17,280x. X-Y plane resolution:~120nm, height resolution:~20-30nm. Measurement modes: profile, area/volume, surface roughness, geometric, film thickness

Institute Georgia Tech
Department IEN - Micro/Nano Fabrication Facility
Sub Tool Of
Georgia Tech Biocleanroom
System Specifications Laser Wavelength: 405nm

X-Y plane resolution: 20nm

Z-axis resolution: 10nm

Applications Non-contact measurement tool capable of step height, area/volume, surface roughness, particle, and film thickness measurements of 3D samples.
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