Olympus LEXT 3D Material Confocal Microscope

Keywords: Georgia Tech, gatech, organic, cleanroom, analysis, materials, characterization, LEXT, confocal, microscope, laser scanning, 3D

Information

Schedule

Training

Equipment Description

The Georgia Tech Olympus LEXT, located in the Georgia Tech Biocleanroom, is a material laser confocal microscope with fixed laser wavelength of 405nm with magnification ranges: 108x – 17,280x. X-Y plane resolution:~120nm, height resolution:~20-30nm. Measurement modes: profile, area/volume, surface roughness, geometric, film thickness

Institute	Georgia Tech
Department	IMS- Micro/Nano Fabrication Facility
Sub Tool Of	Georgia Tech Biocleanroom
System Specifications	Laser Wavelength: 405nm X-Y plane resolution: 20nm Z-axis resolution: 10nm
Applications	Non-contact measurement tool capable of step height, area/volume, surface roughness, particle, and film thickness measurements of 3D samples.