IEN - Micro/Nano Fabrication Facility
8.4 Using Fume Hood

This section gives the correct procedure for using the fume hood, the list of heating and non-heating processes and things you should be aware of before using the fume hood. 

Fume hood is a common equipment inside cleanroom that is frequently used for many processes such as cleaning, etching, developing, etc. You need understand what a process does, not just how to do the process and plan ahead, if you don’t want to ruin your own sample. Here below is correct procedure for planning to work at fume hood, as well as the list of heating and non-heating processes.


Procedure For Using the Fume Hood

Fumehood procedure


Heating and non-Heating Processes

Heating not heating processes

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Things you should be aware of before using the fume hood

Check to make sure that fume hood is working properly

  • Test the fume hood with all the equipment/bottle/hotplates/etc. still in the fume hood.
  • Leave the face/splash guard down when using the hood.
  • Texwipes – Use a texwipe at the entrance of the hood and at the base/back of the hood and ensure that there is suction. (PREFERED METHOD)  Don’t let go of the tex wipe because it can be sucked into the ventilation system.  
  • Remove any texwipes that may be covering the vents on the counter of the hood.  
  • Note that there are small vent holes on the horizontal surface in the front as well as in the back.  There are also larger vent holes on the vertical surface in the back.  Too many objects in the back, such as bottles and hot plates can block proper air flow.

If hood is not working properly

  • Check to make sure that the hood has been turned on (switch is located above hood opening on the left or right).
  • An alarm will buzz at start up for 10 seconds.  If the buzz does not stop after 10 seconds, then the fume hood is not working properly.  
  • If hood still is not working properly, tell the IEN staff member, put in a Service Request, and put up a “DO NOT USE” sign on the hood.

If there is any liquid on the fume hood surface

  • Put on acid gloves and test the liquid with pH paper.
    • Acids and bases can be stronger than what is designated with 0-14 pH paper.  Caution should be used with testing liquids with pH paper.
  • If an acid/base, and a small spill, wipe up with a texwipe.
  • If an acid/base, and a large spill, contact a member of IEN staff.
  • NEVER assume that something is water.

Water in the fumehood

  • Use DI water for all processing related activities
    • Press foot pedal to turn on water
    • Water flow can be adjusted using the knob labelled DI water
    • If water does not flow when pedal is pressed, adjust water flow knob
    • If water still does not flow, notify IEN staff
  • City water should be used when rinsing empty bottle only
    • City water flow is controlled by knob labelled city water
    • Do not use city water for processing related activities (i.e. rinsing, cleaning labware, etc.)

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Contact Information
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 |