IEN- Micro/Nano Fabrication Facility
8.6 Handling Equipment

The following  chart shows some examples of general process safety issues with several equipment groups. These hazards will be discussed in greater detail in the individual equipment trainings and users will be tested on how to handle these hazards during the equipment checkoff. Users should reserve the equipment in advance and follow the standard operating procedure (SOP) when using the equipment. Users should never neglect these safety rules, as it may cause serious personal injury and/or equipment damage.

Handling Equipment

Processing safety

Contact Information
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 | hang.chen@ien.gatech.edu
https://cleanroom.gatech.edu