IEN - Micro/Nano Fabrication Facility
6.2 Developers

Developers are chemicals used to remove photoresist from regions on a substrate after UV exposure. The GT IEN Cleanroom provides a selection of developers that are suitable for developing the photoresists provided by the cleanroom. Microposit MF 319 and Mircroposit 351 developers can be used to develop SC1813, SC1827, and SPR 220 7.0. RD6 is the developer for NR71-3000P and NR9-1500PY. SU-8 developer is used to develop SU-8. THe data sheet and the SDS for each developer can be found at the links below.


Contact Information
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332

For process support please click below