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IMS- Micro/Nano Fabrication Facility
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Processing
1. New User Preparation
2. Processing Basics
3. Recipe Library
4. Processing Procedure
5. Process/Equipment Selection
6. Processing Materials
6.1 Photoresists
6.2 Developers
6.2.1 MF 319 Developer
6.2.2 351 Developer
6.2.3 RD6 Developer
6.2.4 SU-8 Developer
6.3 Resist Stripper
6.4 Solvents
6.5 Acids
6.6 Bases
6.7 Oxidizers
7. Equipment Baseline
8. Processing Safety
9. Request Help
A. System Contamination Control Policy
6.2.4 SU-8 Developer
Contact Information
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332
For process support please click below
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