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IMS- Micro/Nano Fabrication Facility
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Processing
1. New User Preparation
2. Processing Basics
3. Recipe Library
4. Processing Procedure
5. Process/Equipment Selection
6. Processing Materials
6.1 Photoresists
6.2 Developers
6.2.1 MF 319 Developer
6.2.2 351 Developer
6.2.3 RD6 Developer
6.2.4 SU-8 Developer
6.3 Resist Stripper
6.4 Solvents
6.5 Acids
6.6 Bases
6.7 Oxidizers
7. Equipment Baseline
8. Processing Safety
9. Request Help
A. System Contamination Control Policy
6.2.3 RD6 Developer
Related Media
MSDS RD6
Contact Information
The Institute for Electronics Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332
For process support please click below
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