IEN - Micro/Nano Fabrication Facility
6.3 Resist Stripper

Resist strippers are chemicals which can be used to remove photoresist from a substrate. Resist strippers are more efficient at removing photoresist than typical solvent cleaning. They also provide superior clean of substrates with hardened or baked on resist versus solvent cleaning. Microposit remover 1165 is used for removing SC1827, SC183, and SPR 220 7.0. Futurrex RR41 resist remover is used for NR71-3000P and NR9-1500PY. The data sheets and SDSs  for each stripper can be found at the following links.


Contact Information
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332

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