Purpose: To prepare photoresist for spin coating
Location: Pettit or Marcus Cleanrooms
Chemicals: acetone, methanol, isopropanol, photoresist
Supplies Needed: glass or Pyrex container, texwipe, tweezers, nitrogen gun, fumehood, photoresist labels, chemical warning form, bottle carrier
Process Procedures:
- Get an amber bottle from the staff office, if needed.
- Take a stock bottle or your amber bottle out of the refrigerator, and allow it to warm up to room temperature (approximately 1 hour) by bringing it in a bottle carrier to a photoresist cabinet.
- If you have a new amber bottle, clean it with an AMI rinse (see cleaning section) and print off chemical labels for it.
- If you already have an amber bottle or your own stock bottle, they should be stored in one of the following locations:
- Labeled photoresist cabinets.
- Refrigerators in the chemical chase.
Time: approximately 5 minutes + time to warm up to room temperature
Comments:
- Photoresist must be at room temperature before use because it is very sensitive to temperature shock.