IMS- Micro/Nano Fabrication Facility
Services

Electron Beam Lithography Training
  • We prefer that individuals be trained to operate the Elionix ELS-G100 themselves, whether they be researchers within Georgia Tech, from other academic institutions, or from a company. We can also be contracted to perform work for you.

  • The first step to being trained is to attend a training session which can be requested on the sums.gatech.edu website.

Electron Beam Lithography Rates

  • Elionix ELS-G100 usage costs:

The following charges apply when an individual operates the ELS-G100.
Georgia Tech Researchers
$60/hr + overhead
Other Academic Researchers
$60/hr + overhead
Industrial Rate
$90/hr + overhead
  • There is a charge for ZEP520A and ESpacer usage.

The following additional charges apply when an individual is not trained to operate the ELS-G100 and staff perform the work instead.

Academic Rate
$100/hr + overhead
Industrial Rate
$100/hr + overhead
  • Overhead rates are as follows:
57.8% for non-USG Universities and non-DOD federal
62.0% for DOD
63.8% for Industry

 

 

 

Contact Information
For process support please click below
Georgia Institute of Technology
Shared User Management System
791 Atlantic Drive
Atlanta GA 30332-0269 
© Georgia Institute of Technology