Electron Beam Lithography Training

  • We prefer that individuals be trained to operate the JBX-9300FS themselves, whether they be researchers within Georgia Tech, from other academic institutions, or from a company. We can also be contracted to perform work for you.

    The first step to being trained is to attend a training session which can be requested on the website.

Electron Beam Lithography Rates

  • JBX-9300FS usage costs:

    The following charges apply when an individual operates the JBX-9300FS.
          Georgia Tech Researchers   $110/hr + overhead
  Other Academic Researchers   $110/hr + overhead
  Industrial Rate   $300/hr + overhead
  • There is a charge for ZEP520A and ESpacer usage.

    The following additional charges apply when an individual is not trained to operate the JBX-9300FS and staff perform the work instead.

          Academic Rate   $100/hr + overhead
  Industrial Rate   $100/hr + overhead

Overhead rates are as follows:

57.8% for non-USG Universities and non-DOD federal
62.0% for DOD
63.8% for Industry
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