IMS- Micro/Nano Fabrication Facility
1.4.2 Equipment Engineers


Tran-Vinh Nguyen 

Plasma & Litho Team Lead

Phone: (404) 385-6678

E-mail: tran-vinh.nguyen@ien.gatech.edu

Responsibility: Equipment maintenance 

Special Skill: Plasma, Vacuum Equipment, Photolithography

Supported Equipment: STS ICP, STS Pegasus, STS HRM, STS AOE, STS SOE, PT-ICP, PT-RIE, Ctrlayer-RIE, Oxford Endpoint RIE, Unaxis RIE, Unaxis PECVD, STS PECVD, Oxford ICP-PECVD, Karl & Suss TSA MA-6 Mask Aligner, EVG Mask Aligner



Charlie Suh 

Laboratory Operation Lead

Phone: (404) 385-0151

E-mail: charlie.suh@ien.gatech.edu

Responsibility: Equipment maintenance 

Special Skill: Evaporation, Sputtering

Supported Equipment: CHA E-Beam Evaporators 1 & 2 (Metals & Dielectric), CVC E-Beam Evaporator 1,  Denton Infinity - E-Beam/Filament Evaporator, Denton Explorer - E-Beam Evaporator, AJA Nitride Sputterer, CVC DC Sputterer, CVC E-Beam Evaporator 1, Denton Discovery - RF/DC Sputterer, Denton Discovery 2 - RF/DC Sputterer, Ctrlayer SDS - Sputterer System



Thomas W Johnson-Averette

Process-Equipment Engr III

Controls Lead/Furnaces Lead

E-mail: thomas.ja@ien.gatech.edu

ResponsibilityEquipment maintenance

Special Skill: Vacuum Equipment And Troubleshooting, Plasma, CVD, Metallization, Electronics Troubleshooting, Component-Level Troubleshooting, Industrial Automation Programming And Configuration, Programming, Human-Machine Interfaces, User Interfaces, Dangerous Gas Monitoring System Maintenance And Administration, Data Monitoring Solutions

Supported Equipment: Tystar Furnace, MRL Furnace, Control system



Alexander L Gallmon

Process-Equipment Engr II

Controls/Furnaces                                                                                   

E-mail: agallmon3@gatech.edu

ResponsibilityEquipment maintenance                                                

Special Skill: Vacuum Equipment and Troubleshooting, Electrical and Electronics troubleshooting, PLC and Microcontroller Programming, HMI Design/Development, Web Development, Network and computer hardware/software troubleshooting.

Supported Equipment: Sputtering, Evaporation, and RTP processes.



Richard H Shafer

Process-Equipment Engr I

Laser Lab

Phone:  (404) 894-9434                                                                          

E-mail: richard.shafer@gatech.edu

Responsibility: Laser lab                                                                        

Special Skill

Supported Equipment



Charles A Turgeon  

Laboratory Coordinator/Evaporators & Sputterers                                    

Phone: (404) 385-0266

E-mail: charlie.turgeon@ien.gatech.edu

Responsibility: Equipment maintenance                                               

Special Skill: Evaporators, Sputterers

Supported Equipment



Dean C Sutter 

Process-Equipment Engr III                                                                      

Advanced Diagnostics Lead

Phone: (404) 385-3899

E-mail: deanc.sutter@ien.gatech.edu

ResponsibilityEquipment maintenance                                            

Special Skill

Supported Equipment



Benjamin P Hollerbach  

Process-Equipment Engr II

Phone: (404) 385-0150

E-mail: ben.hollerbach@gatech.edu 

Responsibility: Equipment maintenance                                         

Special Skill: Photolithography, Micro/Nano 3D lithography, 3D Printing, Materials Growth, Atomic Layer Deposition, Photomask Design, Design Engineering

Supported EquipmentHeidelberg MLA150, Cambridge Nanotech FIJI ALD, Veeco FIJI ALD, CtrLayer ALD, Aixtron Black Magic PECVD, Nanoscribe Photonic Professional GT



Andrew B Watkins  

Laboratory Technician I

Phone: (404) 385-6678

E-mail: andrew.watkins@ien.gatech.edu                                                 

Responsibility: Equipment maintenance                                      

Special Skill: Plasma / Litho Team

Supported Equipment: 



Chinaza A Ogbonna

Research Engineer I

Phone: (404) 385-0151

E-mail: chinaza@gatech.edu                                                                   

ResponsibilityEquipment maintenance                                   

Special SkillPhotolithography, Electron-Beam lithography, Micro/Nano 3D Lithography, Lasers

Supported Equipment: Heidelberg MLA 150, Nanoscribe 3D Lithography, Elionix Electron Beam Lithography system, Cambridge Nanotech ALD, Veeco ALD, OPTEC Femtosecond Laser, Alabama Laser, Resonetics IR Laser, PixDro Ink Jet Printer



Bob Rose 

Construction Project Mgr I

Infrastructure Systems and Construction                                                  

Phone: (404) 894-9405

E-mail: bob.rose@ien.gatech.edu                                              

Responsibility

Special Skill:

Supported Equipment



Brian K Doles

Facilities Mgr I

Facility Manager 

Phone: (470) 381-8836

E-mail: brian.doles@ien.gatech.edu                                                     

Responsibility

Special Skill

Supported Equipment

Contact Information
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332

For process support please click below